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A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Author(s):
Publication title:
Nitrides and oxynitrides : proceedings of the second International Symposium on Nitrides, held in Limerick, Ireland, June 9-11, 1998
Title of ser.:
Materials science forum
Ser. no.:
325-326
Pub. Year:
2000
Page(from):
131
Page(to):
140
Pages:
10
Pub. info.:
Zurich-Uetikon, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498505 [0878498508]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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