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Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

Author(s):
Publication title:
Rare earths '98 : proceedings of the International Conference on Rare Earths, held in Fremantle, Western Australia, October 25-30, 1998
Title of ser.:
Materials science forum
Ser. no.:
315-317
Pub. Year:
1999
Page(from):
216
Page(to):
221
Pages:
6
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498413 [0878498419]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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