Ion Beam Induced Chemical Vapor Deposition of Dielectric Materials

Ion Beam Induced Chemical Vapor Deposition of Dielectric Materials

Author(s):

Wanzenboeck, H.D.

Publication title:

Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

624

Pub. Year:

2001

Page(from):

163

Page(to):

170

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995321 [1558995323]

Language:

English

Call no.:

M23500/624

Type:

Conference Proceedings

Details

TDL ID:	ZA00014210
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials development for direct write technologies
Conf. info. (Number):	2000
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2000.04.24-2000.04.26

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