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Inductively Coupled High-Density Plasma-Induced Etch Damage Of GaN MESFETs

Author(s):
Shul, Randy J.
Zhang, L.
Baca, A.G.
Willison, Christi G.
Hans, J.
Pearton, S.J.
Lee, K.P.
Ren, F.
3 more
Publication title:
Wide-bandgap electronic devices
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
622
Pub. date:
2001
Page(from):
T7.5
Pub. info.:
Warrendale, PA.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995307 [1558995307]
Language:
English
Call no.:
M23500/622
Type:
Conference Proceedings

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