Solid Phase Crystallization (SPC) Behavior of Amorphous Si Bilayer Films With Different Concentration of Oxygen: Surface vs. Interface-Nucleation

Solid Phase Crystallization (SPC) Behavior of Amorphous Si Bilayer Films With Different Concentration of Oxygen: Surface vs. Interface-Nucleation

Author(s):

Publication title:

Electron-emissive materials, vacuum microelectronics and flat-panel displsys : symposium held April 25-27 2000, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

621

Pub. Year:

2001

Page(from):

Q6.3

Pub. info.:

Pittsburgh, PA.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995291 [1558995293]

Language:

English

Call no.:

M23500/621

Type:

Conference Proceedings

Details

TDL ID:	ZA00014207
Series ID:	PA00000011
Conf. info. (Name):	Symposium on electron-emissive materials, vacuum microelectronics and flat-panel displsys
Conf. info. (Number):	2000
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2000.04.25-2000.04.27

Similar Items:

1 Conference Proceedings Solid-Phase Crystallization of Amorphous Si0.7Ge0.3/Si and Si/Si0.7Ge0.3 Bilayer Films on SiO2 Kim, Tae-Hoon, Ryu, Myung-Kwan, Kim, Jin-Won, Kim, Chang-Soo, Kim, Ki-Bum MRS - Materials Research Society	7 Conference Proceedings Microstructure and Preferred Orientation of Solid Phase Crystallized a-(Si/Si0.7Ge0.3) and a-(Si0.7Ge0.3/Si) Bilayer Films on SiO2 Kim, T.H., Ryu, M.K., Kim, K.B. Electrochemical Society
2 Conference Proceedings Effects of Germanium on Grain Size and Surface Roughness of the Solid-Phase Crystallized Polycrystalline Si1-xGex Films Kim, Jin-Won, Ryu, Myung-Kwan, Kim, Tae-Hoon, Kim, Ki-Bum, Kim, Sang-Joo MRS - Materials Research Society	8 Conference Proceedings Solid Phase Crystallization (SPC) of a-Si Thin Film Induced by a Novel Approach for Photovoltaic Devices T. Kim, P. Kumar, J.S. Lee, K. Siebein, R.K. Singh Electrochemical Society
3 Conference Proceedings Effect of Surface Nucleation on the Evolution of Crystalline Microstructure During Solid Phase Crystallization of Amorphous Si Film on SiO2 Ryu, M.K., Hwang, S.M., Kim, T.H., Kim, K.B. Electrochemical Society	9 Conference Proceedings A Study on the Metal-Induced Lateral Crystallization Behavior of Amorphous Silicon Thin Films Lee, Byung-Il, Kim, Kwang-Ho, Jeong, Won-Cheol, Ahn, Pyung-Su, Shin, Jin-Wook, Joo, Seung-Ki MRS - Materials Research Society
4 Conference Proceedings Manufacturing of TFTs with High Deposition Rated Microcrystalline Silicon Using Plasma Enhanced Chemical Vapor Deposition Kyung-Bae Park, Ji-Sim Jung, Jong-Man Kim, Myung-kwan Ryu, Sang-Yoon Lee, Jang-Yeon Kwon Materials Research Society	10 Conference Proceedings Effects of Hydrogen Plasma Treatment on Hysteresis Phenomenon and Electrical Properties for Solid Phase Crystallized Silicon Thin Film Transistors Sung-Hwan Choi, Sang-Geun Park, Chang-Yeon Kim, Min-Koo Han Materials Research Society
5 Conference Proceedings The Simulation Of Copper Drift in SiO2 During Bias Temperature Stress (Bts) Test Kwon, Jang-Yeon, Kim, Ki-Su, Joo, Young-Chang, Kim, Ki-Bum Materials Research Society	11 Conference Proceedings TuD3:Crystallization behavior of sputter-deposited nitrogen-doped amorphous Ge2Sb2Te5 thin films Seo,H., Jeong,T.-H., Park,J.-W., Yeon,C., Lee,D.-C., Kim,S.-J., Lim,H.-J., Kim,S.-Y. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Excimer Laser Crystallization of Amorphous Silicon Film with Artificially Designed Spatial Intensity Profile Beam E. Kim, K. Kim, M. Ryu, H. Kwon, C. Kim Electrochemical Society	12 Conference Proceedings PULSED LASER CRYSTALLIZATION OF GeXSi1-X ALLOY FILMS ON Si(100) SUBSTRATES Abelson, John R., Weiner, Kurt H., Kim, Ki-Bum, Sigmon, Thomas W. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12