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In Situ Study of Barrier Layers Using Spectroscopic Ellipsometry and Mass Spectroscopy of Recoiled Ions

Author(s):
Gao, Y.
Mueller, A.H.
Irene, E.A.
Auciello, O.
Krauss, A.R.
Schultz, J.A.
1 more
Publication title:
Recent developments in oxide and metal epitaxy : theory and experiment
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
619
Pub. Year:
2000
Page(from):
135
Page(to):
140
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995277 [1558995277]
Language:
English
Call no.:
M23500/619
Type:
Conference Proceedings

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