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Optimization Of The Processing Parameters For Pulsed Laser Deposition Of Nickel Silicide Ohmic Contacts On SiC

Author(s):
Richardson, C.J.K.
Wisnioski, M.H.
Spicer, J.B.
Demaree, J.D.
Cole, M.W.
Hubbard, C.W.
Joshi, P.C.
Hirvonen, J.K.
Kim, H.
Pique, A.
Chrisey, D.B.
6 more
Publication title:
Laser-solid interactions for materials processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
617
Pub. Year:
2001
Page(from):
J7.4
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995253 [1558995250]
Language:
English
Call no.:
M23500/617
Type:
Conference Proceedings

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