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Large Anisotropy Via Oblique Sputtering of Ta Underlayers

Author(s):
Bonevich, J.E.
McMichael, R.D.
Lee, C.G.
Chen, P.J.
Miller, W.
Egelhoff, W.F.
1 more
Publication title:
Polycrystalline metal and magnetic thin films-2000 : symposium held April 25-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
615
Pub. Year:
2001
Page(from):
G5.7/F7.7
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995239 [1558995234]
Language:
English
Call no.:
M23500/615
Type:
Conference Proceedings

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