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Smoothing Thin Films With Gas-Cluster Ion Beams

Author(s):
Fenner, D.B.
Hautala, J.
Allen, L.P.
Greer, J.A.
Skinner, W.J.
Budnick, J.I.
1 more
Publication title:
Magnetic materials, structures and processing for information storage: symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
614
Pub. Year:
2001
Page(from):
F10.3
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995222 [1558995226]
Language:
English
Call no.:
M23500/614
Type:
Conference Proceedings

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