Dry Etching of MRAM Structures
- Author(s):
Pearton, S.J. Cho, H. Jung, K.B. Childress, J.R. Sharifi, F. Marburger, J. - Publication title:
- Magnetic materials, structures and processing for information storage: symposium held April 24-27, 2000, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 614
- Pub. Year:
- 2001
- Page(from):
- F10.2
- Pub. info.:
- Warrendale, PA: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995222 [1558995226]
- Language:
- English
- Call no.:
- M23500/614
- Type:
- Conference Proceedings
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