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Technique Of Surface Control With The Electrolyzed D.I.water For Post CMP Cleaning

Author(s):
Shirakashi, M.
Itoh, K.
Katakabe, I.
Kamezawa, M.
Kihara, S.
Tsujimura, M.
Saitoh, T.
Yamada, K.
Miyashita, N.
Kodera, M.
Matsui, Y.
6 more
Publication title:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
612
Pub. Year:
2001
Page(from):
D11.2/E8.2
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995208 [155899520X]
Language:
English
Call no.:
M23500/612
Type:
Conference Proceedings

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