Blank Cover Image

Microstructure And Electronic Properties Of Thin Film Nanoporous Silica As A Function Of Processing And Annealing Methods

Author(s):
Caragianis-Broadbridge, C.
Miecznikowski, J.R.
Zhu, W.
Luo, Z.
Han, J.
Lehman, A. Hein
1 more
Publication title:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
612
Pub. Year:
2001
Page(from):
D5.16
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995208 [155899520X]
Language:
English
Call no.:
M23500/612
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Preparation, Microstructure and Physical Characteristics of Ferroelectric Pb5Ge3O11 Thin Films for Memory Application

Liu, Y. X., Caragianis-Broadbridge, C., Lehman, A. H., McGuinness, J., Ma, T. P.

Materials Research Society
7 Conference Proceedings Effect of annealing on microstructure and properties of Al-Ti multilayered films

Mitra, R., Madan, A., Hoffman, R. A., Chiou, W. A., Weertman, J. R.

MRS-Materials Research Society
2 Conference Proceedings Microstructure and Physical Properties of Ferroelectric-gate Memory Capacitors with Various Buffer Layers

Caragianis-Broadbridge, Christine, Han, Jin-ping, Ma, T.P., Lehma, Ann Hein, Zhu, Wenjuan, Luo, Zhijiong, Pechkis, …

Materials Research Society
8 Conference Proceedings Fabrication of sub-100nm thick Nanoporous silica thin films

M. Ojha, W. Cho, J.L. Plawsky, W.N. Gill

American Institute of Chemical Engineers
3 Conference Proceedings Improving 4H-SiC/SiO2 Interface Properties by Depositing Ultra-Thin Si Nitride Layer Prior to Formation of SiO2 and Annealing

Wang, X.W., Bu, H.M., Laube, B.L., Caragianis-Broadbridge, C., Ma, T.P.

Trans Tech Publications
9 Conference Proceedings Morphology and Microstructure of Tungsten Films by Magnetron Sputtering

J.G. Yu, W.J. Han, Z.C. Sun, K.G. Zhu

Trans Tech Publications
4 Conference Proceedings Improving 4H-SiC/SiO2 Interface Properties by Depositing Ultra-Thin Si Nitride Layer Prior to Formation of SiO2 and Annealing

Wang, X.W., Bu, H.M., Laube, B.L., Caragianis-Broadbridge, C., Ma, T.P.

Trans Tech Publications
10 Conference Proceedings Microstructure Characterization of Si/C Multilayer Thin Films

T. Han, G.R. Chang, Y.J. Sun, F. Ma, K.W. Xu

Trans Tech Publications
5 Conference Proceedings Sol-Gel Processing of Low Dielectric Constant Nanoporous Silica Thin Films

Kim, Deok-Yang, Du, Henry, Bhandarkar, Suhas, Johnson, David W. Jr.

Materials Research Society
11 Conference Proceedings Characterization of nanoparticles by computer imaging particle analysis

J. DaPonte, T. Sadowski, C. C. Broadbridge, P. Munhutu, A. Lehman

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings SOL-GEL THIN FILM ELECTRONIC PROPERTIES

Warren, W. L., Lenahan, P. M., Brinker, C. J., Shaffer, G. R., Ashley, C. S., Reed, S. T.

Materials Research Society
12 Conference Proceedings Effects of Annealing Condition on the Preparation of Indium-Tin Oxide (ITO) Thin Films via Sol-Gel Spin Coating Process

Han, H. W., Yun, Y. H., Choi, S. C.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12