Monte Carlo Analysis Of The Evolution From Point To Extended Interstitial Type Defects in Crystalline Silicon

Monte Carlo Analysis Of The Evolution From Point To Extended Interstitial Type Defects in Crystalline Silicon

Author(s):

Publication title:

Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

610

Pub. Year:

2001

Page(from):

B11.5

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558995185 [1558995188]

Language:

English

Call no.:

M23500/610

Type:

Conference Proceedings

Details

TDL ID:	ZA00014198
Series ID:	PA00000011
Conf. info. (Name):	Symposium on Si front-end processing
Conf. info. (Number):	2nd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2000.04.24-2000.04.27

Similar Items:

1 Conference Proceedings Relative Stability Of Silicon Self-Interstitial Defects Cristiano, Fuccio, Colombeau, Benjamin, Mauduit, Bermadette de, Giles, Felipe, Omri, Mourad, Claverie, Alain Materials Research Society	7 Conference Proceedings Effect of B Dose and Ge Preamorphization Energy on the Electrical and Structural Properties of Ultrashallow Junctions in Silicon-On-Insulator Justin J. Hamilton, Erik J.H. Collart, Benjamin Colombeau, Massimo Bersani, Damiano Giubertoni, Max Kah, Nicholas E.B. … Materials Research Society
2 Conference Proceedings Thermal Evolution Of Extrinsic Defects In Ion Implanted Silicon: Current Understanding And Modelling Cristiano, Fuccio, Colombeau, Benjamin, Mauduit, Bernadette de, Bonafos, Caroline, Benassayag, Gerard, Claverie, Alain Materials Research Society	8 Conference Proceedings Physics-Based Diffusion Simulations for Preamorphized Ultra-Shallow Junctions Cowern, N. E. B., Colombeau, B., Lampin, E., Cristiano, F., Claverie, A., Lamrani, Y., Duffy, R., Venezia, V., Heringa, … Materials Research Society
3 Conference Proceedings 10 Relation between thermal evolution of interstitial defects and Transient Enhanced Diffusion in silicon Claverie, A., Cristiano, F., Colombeau, B., Hebras, X., Calvo, P., Cherkoshin, N., Larnrani, Y., Scheid, E., de Mauduit, … Electrochemical Society	9 Conference Proceedings Current Understanding and Modeling of B Diffusion and Activation Anomalies in Preamorphized Ultra-Shallow Junctions Colombeau, B., Smith, A.J., Cowern, N.E.B., Pawlak, B.J., Cristiano, F., Duffy, R., Claverie, A., Ortiz, C.J., Pichler, … Materials Research Society
4 Conference Proceedings Atomistic Simulations of Extrinsic Defects Evolution and Transient Enhanced Diffusion in Silicon Claverie, A., Colombeau, B., Cristiano, F., Altibelli, A., Bonafos, C. Materials Research Society	10 Conference Proceedings Transient Enhanced Diffusion and Ostwald Ripening of Ion-Implantation Generated Defects in Silicon Cowern, N.E.B., Mannino, G., Roozeboom, F., Stalk, P.A., Huizing, H.G.A., van Berkum, J.G.M, Toan, N.N., Woerlee, P.H., … Electrochemical Society
5 Conference Proceedings Role of Silicon and Boron Interstitial Clusters in Transient Enhanced Diffusion Cowern, N.E.B., Mannino, G., Roozeboom, F., van Berkum, J.G.M, Colombeau, B., Claverie, A. Electrochemical Society	11 Conference Proceedings Ostwald Ripening of {113} Defects Precursors and Transient Enhanced Diffusion Mannino, G., Cowern, N. E. B., Stolk, P. A., Roozeboom, F., Huizing, H. G. A., Berkum, J. G. M. van, Boer, W. B. de, … MRS - Materials Research Society
6 Conference Proceedings Effect of the Ge Preamorphization Dose on the Thermal Evolution of End of Range Defects Colombeau, B., Cristiano, F., Marrot, J.-C., Assayag, G. Ben, Claverie, A. Materials Research Society	12 Conference Proceedings Extended Defects Evolution in Pre-Amorphised Silicon after Millisecond Flash Anneals F. Cristiano, E.M. Bazizi, P.F. Fazzini, S. Boninelli, R. Duffy Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12