Blank Cover Image

The Effect of Carbon/Self-Interstitial Clusters on Carbon Diffusion in Silicon Modeled by Kinetic Monte Carlo Simulations

Author(s):
Pinacho, Ruth
Jaraiz, Martin
Gossmann, Hans J.
Gilmer, George H.
Benton, Janet L.
Werner, P.
1 more
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
610
Pub. Year:
2001
Page(from):
B7.2
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995185 [1558995188]
Language:
English
Call no.:
M23500/610
Type:
Conference Proceedings

Similar Items:

Jaraiz, Martin, Castrillo, Pedro, Pinacho, Ruth, Pelaz, Lourdes, Barbolla, Juan, Gilmer, George H., Rafferty, Conor S.

Materials Research Society

7 Conference Proceedings Interstitial Defect Reactions in Silicon

Zhao, S., Agarwal, A. M., Benton, J. L., Gilmer, G. H., Kimerling, L. C.

MRS - Materials Research Society

Pelaz, L., Gilmer, G. H., Jaraiz, M., Gossmann, H-J., Rafferty, C. S., Eaglesham, D. J., Poate, J. M.

MRS - Materials Research Society

Lavine, J. P., Lee, S. -T., Black, D. L., Losee, D. L., Jarman, C. M.

Materials Research Society

Rubio, J. Emiliano, Jaraiz, Martin, Bailon, Luis, A., Barbolla, Juan, Lopez, M. Jose, Gilmer, George H.

MRS - Materials Research Society

Ladd, L.A., Kalejs, J.P.

Materials Research Society

Jaraiz, Martin, Pelaz, Lourdes, Rubio, Emiliano, Barbolla, Juan, Gilmer, George H., Eaglesham, David J., Gossmann, Hans …

MRS - Materials Research Society

K.R.C. Mok, B. Colombeau, M. Jaraiz, P. Castrillo, J.E. Rubio, R. Pinacho, M.P. Srinivasan, F. Benistant, I. …

Materials Research Society

Jackson, Kenneth A., Gilmer, George H., Temkin, Dmitri E.

National Aeronautics and Space Adminstration

11 Conference Proceedings Silicon Self-Interstitial Clusters

Colombo, L., Bongiorno, A., Rosati, M.

MRS - Materials Research Society

Gossman, H.-J., Stolk, P.A., Eaglehsam, D.J., Gilmer, G.H., Poate, J.M.

Electrochemical Society

12 Conference Proceedings Diffusion Monte-Carlo without All the Hops

Tomas Oppelstrup, Vasily V. Bulatov, George H. Gilmer, Malvin H. Kalos, Babak Sadigh

American Institute of Chemical Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12