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Phosphorus / Silicon Interstitial Annealing After Ion Implantation

Author(s):
Keys, P. H.
Brindos, R.
Krishnamoorthy, V.
Puga-Lambers, M.
Jones, K. S.
Law, Mark E.
1 more
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
610
Pub. date:
2001
Page(from):
B6.6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995185 [1558995188]
Language:
English
Call no.:
M23500/610
Type:
Conference Proceedings

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