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Activation Of Implanted Poly Gates By Short Cycle Time Annealing

Author(s):
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
610
Pub. Year:
2001
Page(from):
B3.3
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995185 [1558995188]
Language:
English
Call no.:
M23500/610
Type:
Conference Proceedings

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