Increasing The Lateral Resolution Of Scanning Spreading Resistance Microscopy

Increasing The Lateral Resolution Of Scanning Spreading Resistance Microscopy

Author(s):

Publication title:

Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

610

Pub. Year:

2001

Page(from):

B2.4

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558995185 [1558995188]

Language:

English

Call no.:

M23500/610

Type:

Conference Proceedings

Details

TDL ID:	ZA00014198
Series ID:	PA00000011
Conf. info. (Name):	Symposium on Si front-end processing
Conf. info. (Number):	2nd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2000.04.24-2000.04.27

Similar Items:

1 Conference Proceedings Pulsed Force-Scanning Spreading Resistance Microscopy (PF-SSRM) For High Spatial Resolution 2D-Dopant Profiling Eyben, P., Fouchier, M., Albart, P., Charon-Verstappen, J., Vandervorst, W. Materials Research Society	7 Conference Proceedings Differential Scanning Calorimeters with Increased Sensitivity and Resolution Reddy, V. N., Byrne, R., Nakamura, N., Sakamoto, O. Society of Plastics Engineers, Inc. (SPE)
2 Conference Proceedings Resistance of Blow Molding Compounds to the Automotive Environment Kline, R. A. Society of Plastics Engineers, Inc. (SPE)	8 Conference Proceedings Compact 4pi beam scanning microscope for imaging cells with a sevenfold increase in axial resolution Gugel, H.F., Rygiel, R., Storz, R. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Employing Scanning Spreading Resistance Microscopy (SSRM) for Improving TCAD Simulation Accuracy of Silicon Carbide R. Elpelt, B. Zippelius, S. Doering, U. Winkler Trans Tech Publications	9 Conference Proceedings Scanning Interferometric Apertureless Microscopy at Ten Angstrom Resolution Wickramasinghe K. H., Martin Y., Zenhausern F. Kluwer Academic Publishers
4 Conference Proceedings Scanning Electron Microscopy Cathodoluminescence Studies of Piezoelectric Fields in an InGaN Multiple Quantum Well Light Emitting Diode Bunker, Kristin L., Garcia, Roberto, Russell, Phillip E. Materials Research Society	10 Conference Proceedings Analysis and Optimization of New Implantation and Activation Mechanisms in Ultra Shallow Junction Implants Using Scanning Spreading Resistance Microscopy (SSRM) Pierre Eyben, Simone Severi, Ray Duffy, Bartek J. Pawlak, Emmanuel Augendre, Wilfried Vandervorst Materials Research Society
5 Conference Proceedings Investigation of CdZnTe crystal defects using scanning spreading resistance microscopy J. Liu, K. C. Mandal, G. Koley Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings Carrier Concentrations in Implanted and Epitaxial 4H-SiC by Scanning Spreading Resistance Microscopy OEsterman, J., Anand, S., Linnarsson, M.K., Hallen, A. Trans Tech Publications
6 Conference Proceedings SCANNING PROBE MICROSCOPY STUDY OF LAYERED DICHALCOGENIDE ReS2 Kelty, Stephen P., Ruppert, Albert F., Chianelli, Russell R., Ren, Jing-Qing, Whangbo, Myung-Hwan MRS - Materials Research Society	12 Conference Proceedings Carrier Concentrations in Implanted and Epitaxial 4H-SiC by Scanning Spreading Resistance Microscopy Osterman, J., Anand, S., Linnarsson, M.K., Hallen, A. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12