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Influence Of Mechanical Stress On The Electrical Performance Of Polycrystalline-Silicon Resistors

Author(s):
Claeys, C.
Ikegami, M.
Kobayashi, K.
Nakabayashi, M.
Ohyama, H.
Simoen, E.
Sunaga, H.
Takami, Y.
Takizawa, H.
Yoneoka, M.
5 more
Publication title:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
609
Pub. Year:
2001
Page(from):
A29.3
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
Language:
English
Call no.:
M23500/609
Type:
Conference Proceedings

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