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Spectroscopic Ellipsometry For The Characterization Of The Morphology Of Ultra-Thin Thermal CVD Amorphous And Nanocrystalline Silicon Thin Films

Author(s):
Hazra, S.
Maeda, T.
Sakata, I.
Suzuki, E.
Taguchi, H.
Tsutsumi, T.
Yamanaka, M.
2 more
Publication title:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
609
Pub. Year:
2001
Page(from):
A24.3
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
Language:
English
Call no.:
M23500/609
Type:
Conference Proceedings

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