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Comparison Of Low Temperature Growth Of Si Thin Films On Amorphous Substrates By MBE And PECVD Methods

Author(s):
AnnaSelvan, J. A.
Gobrecht, J.
Grutzmacher, D.
Kummer, M.
Miiller, E.
Rebien, M.
vonKanel, H.
2 more
Publication title:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
609
Pub. Year:
2001
Page(from):
A19.4
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
Language:
English
Call no.:
M23500/609
Type:
Conference Proceedings

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