Blank Cover Image

Surface Microchemical Reactions During Hydrogenated Silicon Growth Studied By In-Situ ESR Technique

Author(s):
Yamasaki, S.  
Publication title:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
609
Pub. Year:
2001
Page(from):
A1.1
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
Language:
English
Call no.:
M23500/609
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Probing the Elementary Surface Reactions of Hydrogenated Silicon PECVD by In Situ ESR

Yamasaki, S., Malten, C., Umeda, T., Isoya, J-I., Tanaka, K.

MRS - Materials Research Society
7 Conference Proceedings PLASMA SURFACE INTERACTION DURING THE GROWTH OF SEMICONDUCTOR THIN FILMS STUDIED BY IN SITU INFRARED ELLIPSOMETRY

Blayo, N., Drevillon, B.

Materials Research Society
2 Conference Proceedings Surface Processes During Growth of Hydrogenated Amorphous Silicon

Aydil, Eray S., Agarwal, Sumit, Valipa, Mayur, Sriraman, Saravanapriyan, Maroudas, Dimitrios

Materials Research Society
8 Conference Proceedings Dynamics of In Cluster Growth during InP(110) Surface Dissociation Studied by In-Situ Reflection Electron Microscopy

Gajdardziska-Josifovska, M., Malay, M. H., Smith, David J.

MRS - Materials Research Society
3 Conference Proceedings Pulsed ESR Studies on Microcrystalline Silicon

Malten, C., Finger, F., Muller, J., Yamasaki, S.

MRS - Materials Research Society
9 Conference Proceedings On the Role of Surface Diffusion and Its Relation to the Hydrogen Incorporation During Hydrogenated Amorphous Silicon Growth

Smets, A. H. M., Kessels, W. M. M., Sanden, M. C. M. van de

Materials Research Society
4 Conference Proceedings Fast In-Diffusion Of Hydrogen At The Initial Stage Of Hydrogen Plasma Treatment On a-Si:H Films Observed By In-Situ ESR Measurements

Das, U. K., Yamasaki, S., Yasuda, T.

Materials Research Society
10 Conference Proceedings Defect states of hydrogenated nanocrystalline silicon studied by surface photovoltage spectroscopy

C. Wang, J. Zhang, W. Yu, L. Wu, W. Ding

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Experimental Observation of Formation Processes in Si/SiO2 Interface Defects using in-situ UHV-ESR System

Mizuochi, N., Futako, W., Yamasaki, S.

Materials Research Society
11 Conference Proceedings Real Time In-Situ Monitoring of Surface Reactions During Plasma Passivation of GaAs

E. S. Aydil, Z. H. Zhou, R. A. Gottscho, Y. J. Chabal

Electrochemical Society
6 Conference Proceedings Substrate-Surface Effect on Initial Growth Process of Microcrystalline Silicon Films

Ikuta, K., Park, J. W., Kuo, L. H., Yasuda, T., Yamasaki, S., Tanaka, K.

MRS - Materials Research Society
12 Conference Proceedings The Influence of Electrons From the Filament on the Material Properties of Hydrogenated Amorphous Silicon Growth by the Hot-Wire Chemical Vapor Deposition …

Nelson, Brent P., Wang, Qi, Iwaniczko, Eugene, Mahan, A. H., Crandall, R. S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12