Ion-Implanted Amorphous Silicon Studied by Variable Coherence TEM

Ion-Implanted Amorphous Silicon Studied by Variable Coherence TEM

Author(s):

Publication title:

Advances in materials problem solving with the electron microscope : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

589

Pub. Year:

2001

Page(from):

247

Page(to):

252

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558994973 [1558994971]

Language:

English

Call no.:

M23500/589

Type:

Conference Proceedings

Details

TDL ID:	ZA00014195
Series ID:	PA00000011
Conf. info. (Name):	Symposium on advances in materials problem solving with the electron microscope
Conf. info. (Number):	1999
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.11.30-1999.12.03

Similar Items:

1 Conference Proceedings The Structure of Ion-Implanted Amorphous Silicon Gibson, J. M., Cheng, J-Y., Voyles, P., Treacy, M. M. J., Jacobson, D. C. MRS - Materials Research Society	7 Conference Proceedings The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation Benton, J.L., Stolk, P.A., Eaglesham, D.J., Jacobson, D.C., Cheng, J.Y., Poate, J.M., Myers, S.M., Haynes, T.E Electrochemical Society
2 Conference Proceedings Changes in the Medium Range Order of α-Si:H Thin Films Observed by Variable Coherence TEM Gibson, J. M., Treacy, M. M. J., Voyles, P. M., Abelson, J. R., Jin, H-C. MRS - Materials Research Society	8 Conference Proceedings DENSITY MEASUREMENTS OF ION IMPLANTED AMORPHOUS SILICON Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M., Roorda, S., Sinke, W.C., Spaepen, F. Materials Research Society
3 Conference Proceedings Thermodynamics of paracrystalline silicon Voyles, P. M., Treacy, M. M. J., Gibson, J. M. MRS-Materials Research Society	9 Conference Proceedings Experimental Methods and Data Analysis for Fluctuation Microscopy Abelson, J. R., Gibson, J. M., Jin, H-C., Treacy, M. M. J., Voyles, P. M. Materials Research Society
4 Conference Proceedings Topological Signatures of Medium Range Order in Amorphous Semiconductor Models Gibson, J. M., Treacy, M. M. J., Voyles, P. M. Materials Research Society	10 Conference Proceedings THERMODYNAMICS AND KINETICS OF CRYSTALLIZATION OF AMORPHOUS Si AND Ge PRODUCED ION IMPLANTATION Donovan, E. P., Spaepen, F., Turnbull, D., Poate, J. M., Jacobson, D. C. North-Holland
5 Conference Proceedings Comparative Fluctuation Microscopy Study Of Medium-Range Order In Hydrogenated Amorphous Silicon Deposited By Various Methods Abelson, J. R., Crall, R. S., Gibson, J. M., Guha, S., Jin, H. C., Treacy, M. M. J., Voyles, P. M., Yang, J. Materials Research Society	11 Conference Proceedings DIFFUSION, SOLUBILITY AND SEGREGATION OF IMPLANTED Cu, Ag AND Au IN AMORPHOUS Si Jacobson, D.C., Elliman, R.G., Gibson, J.M., Olson, G.L., Poate, J.M., Williams, J.S. Materials Research Society
6 Conference Proceedings Control of Medium Range Order in Amorphous Silicon via Ion and Neutral Bombardment Gerbi, Jennifer E., Voyles, Paul M., Treacy, Michael M.J., Gibson, J. Murray, Chen, Wangchun, Heuser, Brent J., Abelson, … Materials Research Society	12 Conference Proceedings MICROSTRUCTURAL CHARACTERIZATION OF HIGH DOSE OXYGEN IMPLANTED SILICON Batstone, J.L., White, Alice E., Short, K..T., Gibson, J.M., Jacobson, D.C. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12