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Process Control Challenges and Solutions: TEOS, W, and Cu CMP

Author(s):
Angyal, M.
Boeck, B.
Cope, J.
Dang, C.
Grudowski, P.
Islam, R.
Kolagunta, V.
Mendonca, J.
Pettinato, C.
Selinidis, S.
Smith, B.
6 more
Publication title:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
566
Pub. Year:
2000
Page(from):
167
Page(to):
172
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558994737 [1558994734]
Language:
English
Call no.:
M23500/566
Type:
Conference Proceedings

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