Blank Cover Image

Abrasive Effects in Oxide Chemical-Mechanical Polishing

Author(s):
Publication title:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
566
Pub. Year:
2000
Page(from):
27
Page(to):
32
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558994737 [1558994734]
Language:
English
Call no.:
M23500/566
Type:
Conference Proceedings

Similar Items:

Bielmann, M., Mahajan, V., Singh, R. K.

Materials Research Society

Choi, W., Lee, S.-M., Singh, R.

Electrochemical Society

Basim, G.B., Adler, J.J., Mahajan, U., Singh, R.K., Moudgil, B.M.

Electrochemical Society

Abiade, J.T., Yeruva, S., Moudgil, B., Kumar, D., Singh, R.K.

Materials Research Society

Agarwal, P., Bielmann, M., Lolt, D., Mahajan, U., Mischler, S., Rosset, E., Singh, R. K.

Materials Research Society

Lee, S.-M., Abiade, J., Choi, W., Singh, R.

Electrochemical Society

Jung, Su-Ho, Singh, Rajiv K.

Materials Research Society

Mahajan, Uday, Lee, Seung-Mahn, Singh, Rajiv K.

Electrochemical Society

Lee, Seung-Mahn, Mahajan, Uday, Chen, Zhan, Singh, Rajiv K.

Electrochemical Society

Tsai, H.J., Chang, C.C., Jeng, Y.R., Chen, S.L.

Trans Tech Publications

Adler, J. J., Rabinovich, Y. I., Singh, R. K., Moudgil, B. M.

MRS - Materials Research Society

Tamboli, D., Banerjee, G., Chang, S., Waddell, M., Butcher, I., Arefeen, Q., Hymes, S.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12