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Amorphous Carbon Nitride Films as a Candidate for Low-Dielectric Constant Materials

Author(s):
Aono, N.
Itoh, T.
Iwasaki, T.
Nitta, S.
Nonomura, S.
Yokoi, H.
1 more
Publication title:
Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
565
Pub. date:
1999
Page(from):
291
Page(to):
296
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994720 [1558994726]
Language:
English
Call no.:
M23500/565
Type:
Conference Proceedings

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