Thermal Conductivity Study of Porous Low-K Dielectric Materials
- Author(s):
Gill, W. N. Ho, P. S. Hu, C. Jain, A. Morgen, M. Plawsky, J. L. Wayner, P. C. - Publication title:
- Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 565
- Pub. Year:
- 1999
- Page(from):
- 87
- Page(to):
- 92
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994720 [1558994726]
- Language:
- English
- Call no.:
- M23500/565
- Type:
- Conference Proceedings
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