Electroplated Damascene Copper: Process Influences on Recrystallization and Texture
- Author(s):
Barr, D. Brown, W. L. Drese, R. Evans-Lutterodt, K. Golovin, D. Graham, L. Gross, M. E. Lingk, C. Ritzdorf, T. Turner, J. - Publication title:
- Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 562
- Pub. Year:
- 1999
- Page(from):
- 215
- Page(to):
- 222
- Pages:
- 8
- Pub. info.:
- Warrendale, PA: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994690 [1558994696]
- Language:
- English
- Call no.:
- M23500/562
- Type:
- Conference Proceedings
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