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Internal Stress in Sputtered Silver Nickel Thin Films and Multilayers: Sputtering Pressure and Thickness Effects

Author(s):
Bottger, A. J.
Gergaud, P.
Pelissonnier-Grosjean, C.
Sstrom, P.
Sundgren, J. E.
Thomas, O.
Yang, H.
2 more
Publication title:
Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
562
Pub. Year:
1999
Page(from):
123
Page(to):
128
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558994690 [1558994696]
Language:
English
Call no.:
M23500/562
Type:
Conference Proceedings

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