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Resistless Patterning of Hydrogenated Amorphous Silicon Films

Author(s):
Benson, J. D.
Collins, R. T.
Dinan, J. H.
Herndon, M. K.
Hollingsworth, R. E.
Johnson, J. N.
1 more
Publication title:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
557
Pub. date:
1999
Page(from):
821
Page(to):
826
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558994645 [1558994645]
Language:
English
Call no.:
M23500/557
Type:
Conference Proceedings

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