Interstitial Trapped Hydrogen Molecules in PECVD Amorphous Silicon
- Author(s):
Borzi, R. Fedders, P. A. Leopold, D. J. Mascarenhas, F. Norberg, R. E. Paul, W. Wickboldt, P. - Publication title:
- Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 557
- Pub. Year:
- 1999
- Page(from):
- 287
- Page(to):
- 292
- Pages:
- 6
- Pub. info.:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994645 [1558994645]
- Language:
- English
- Call no.:
- M23500/557
- Type:
- Conference Proceedings
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