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Interstitial Trapped Hydrogen Molecules in PECVD Amorphous Silicon

Author(s):
Borzi, R.
Fedders, P. A.
Leopold, D. J.
Mascarenhas, F.
Norberg, R. E.
Paul, W.
Wickboldt, P.
2 more
Publication title:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
557
Pub. Year:
1999
Page(from):
287
Page(to):
292
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558994645 [1558994645]
Language:
English
Call no.:
M23500/557
Type:
Conference Proceedings

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