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Very Wide-Gap and Device-Quality a-Si:H From Highly H2 Diluted SiH4 Plasma Decomposed by High rf Power

Author(s):
Kiyama, S.
Okamoto, S.
Terada, N.
Terakawa, A.
Wakisaka, K.
Yata, S.
1 more
Publication title:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
557
Pub. date:
1999
Page(from):
145
Page(to):
150
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558994645 [1558994645]
Language:
English
Call no.:
M23500/557
Type:
Conference Proceedings

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