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Fast Deposition of a-Si:H Layers and Solar Cells in a Large-Area (40 x 40 cm2) VHF-GD Reactor

Author(s):
Fischer, D.
Howling, A.
Kroll, U.
Meier, J.
Sansonnens, L.
Shah, A.
1 more
Publication title:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
557
Pub. Year:
1999
Page(from):
121
Page(to):
126
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558994645 [1558994645]
Language:
English
Call no.:
M23500/557
Type:
Conference Proceedings

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