Blank Cover Image

Circuit Pattern Cu Deposition on Polyimide Surface Using ArF Excimer Laser

Author(s):
Publication title:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
546
Pub. Year:
1999
Page(from):
207
Page(to):
212
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994522 [1558994521]
Language:
English
Call no.:
M23500/546
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Photochemical Formation of Cu Thin Films on Polyimide Surface Using ArF Excimer Laser

Tomita, M., Murahara, M.

Electrochemical Society
7 Conference Proceedings Fluorination of Polyimide Sheet Surface by Using Xe2 Excimer Lamp and CF4

Ikegame, T., Murahara, M.

Electrochemical Society
2 Conference Proceedings Open Air Fabrication Process of Cu Thin Films on Teflon Surface Using ArF Excimer Laser Irradiation

Okoshi, M., Toyoda, K., Murahara, M.

MRS - Materials Research Society
8 Conference Proceedings SELECTIVE DEPOSITION OF ZnS THIN FILMS BY KrF EXCIMER LASER ON PATTERNED Zn SEEDS

Yamane, K., Murahara, M.

MRS - Materials Research Society
3 Conference Proceedings High-Resolution Displacement of Functional Groups Onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

Shimizu, T., Murahara, M.

MRS - Materials Research Society
9 Conference Proceedings GROWTH OF SILICON FILMS ONTO FLUORORESIN SURFACE BY ArF EXCIMER LASER

Miyokawa, T., Okoshi, M., Toyoda, K., Murahara, M.

MRS - Materials Research Society
4 Conference Proceedings ArF Excimer Laser and Xe2 Excimer Lamp Induced Photochemical Fluorination of Polyimide Film

Ikegame, T., Murahara, M.

MRS - Materials Research Society
10 Conference Proceedings Photo-Chemical Pattern Etching of Silicon-Carbide by Using Excimer Laser and Hydrogen Peroxide Solution

Sasaki, D., Murahara, M.

Materials Research Society
5 Conference Proceedings Growth of metal nucleus on polyimide surface with photochemical reaction

Tomita, M., Murahara, M.

MRS-Materials Research Society
11 Conference Proceedings Photochemical Moisture Proof Coating on Nonlinear Optical Crystal by ArF Excimer Laser

Kojima, M., Murahara, M.

Materials Research Society
6 Conference Proceedings Photochemical polishing of fused-silica optics by using ArF excimer laser

Murahara,M.M.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings HIGH SELECTIVE ETCHING OF SiO2/Si BY ArF EXCIMER LASER

Kitamura, K., Murahara, M.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12