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Dry Etching of Sol-Gel PZT

Author(s):
Conrad, J.
Dubey, M.
Ewin, M.
Piekarz, R.
Rod, B.
Shepard, J.
Su, T.
Trolier-McKinstry, S.
Zeto, R.
4 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
546
Pub. Year:
1999
Page(from):
159
Page(to):
164
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994522 [1558994521]
Language:
English
Call no.:
M23500/546
Type:
Conference Proceedings

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