Performance of Ultrahard Carbon Wear Coatings on Microgears Fabricated by LIGA
- Author(s):
AgerIII, J.W. Brown, I.G. Christenson, T.R. Dugger, M.T. Follstaedt, D.M. Knapp, J.A. Monteiro, O.R. - Publication title:
- Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 546
- Pub. Year:
- 1999
- Page(from):
- 115
- Page(to):
- 120
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994522 [1558994521]
- Language:
- English
- Call no.:
- M23500/546
- Type:
- Conference Proceedings
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