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Stress-Caused Deflections of Asymmetrical Coated Single-Crystal Silicon Elements

Author(s):
Kuechler, M.
Griesbach, K.
Bertz, A.
Gessner, T.
Faust, T.
Dudek, R.
1 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
546
Pub. Year:
1999
Page(from):
33
Page(to):
38
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994522 [1558994521]
Language:
English
Call no.:
M23500/546
Type:
Conference Proceedings

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