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Measurement of Stress in CVD Diamond Films

Author(s):
Publication title:
Mechanical behavior of diamond and other forms of carbon : symposium held April 17-21, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
383
Pub. Year:
1995
Page(from):
135
Page(to):
142
Pages:
8
Pub. info.:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9781558992863 [1558992863]
Language:
English
Call no.:
M23500/383
Type:
Conference Proceedings

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