
{311} DEFECT FORMATION AND EVOLUTION FOR Si AND B IMPLANTS
- Author(s):
- Publication title:
- State-of-the-art program on compound semiconductors XL (SOTAPOCS XL) and narrow bandgap optoelectronic materials and devices II : proceedings of the international symposia
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 96-4
- Pub. date:
- 2004
- Page(from):
- 374
- Page(to):
- 378
- Pages:
- 5
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770644 [1566770645]
- Language:
- English
- Call no.:
- E23400/200402
- Type:
- Conference Proceedings
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