Nanostructures on Epitaxial SiGe Films in Silicon
- Author(s):
- Publication title:
- Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2004-02
- Pub. Year:
- 2004
- Page(from):
- 241
- Page(to):
- 252
- Pages:
- 12
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774079 [1566774071]
- Language:
- English
- Call no.:
- E23400/961823
- Type:
- Conference Proceedings
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