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Nanostructures on Epitaxial SiGe Films in Silicon

Author(s):
Publication title:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-02
Pub. Year:
2004
Page(from):
241
Page(to):
252
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774079 [1566774071]
Language:
English
Call no.:
E23400/961823
Type:
Conference Proceedings

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