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Effects of the Silicon Nitride Passivation on the DC and RF Performance of 0.1μm Pseudomorphic pHEMTs

Author(s):
Oh, J-H.
Sul, W-S.
Han, H-J.
Son, M-S.
Rhee, J.-K.
Kim, S-D.
1 more
Publication title:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-02
Pub. Year:
2004
Page(from):
111
Page(to):
118
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774079 [1566774071]
Language:
English
Call no.:
E23400/961823
Type:
Conference Proceedings

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