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Indium Phosphide (InP) Heterojunction Bipolar Transistor (HBT) Passivation with Bisbenocyclyrobutene (BCB)

Author(s):
Dang, L.
Kaneshiro, E.
Wang, J.
Monier, C.
Eldredge, J.
Sato, K.
Chang, P. C.
Sawdai, D.
Bhorania, R.
Gutierrez-Aitken, A.
Goosrky, M.
6 more
Publication title:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-02
Pub. Year:
2004
Page(from):
103
Page(to):
110
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774079 [1566774071]
Language:
English
Call no.:
E23400/961823
Type:
Conference Proceedings

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