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Kinetic Monte Carlo Simulation of Gas Phase Nudeation of Particle during Chemical Vapor Deposition of Silicon

Author(s):
Publication title:
Second Topical Conference on Nanometer Scale Science and Engineering : proceedings of the conference held as part of the AIChE annual meeting at Indianapolis, Indiana, November 3-8, 2002
Title of ser.:
AIChE Conference Proceedings
Ser. no.:
P-168
Pub. Year:
2002
Page(from):
275
Page(to):
282
Pages:
8
Pub. info.:
New York: American Institute of Chemical Engineers
ISBN:
9780816908875 [0816908877]
Language:
English
Call no.:
A07755/200202
Type:
Conference Proceedings

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