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Low Temperature Processes for P-Type Polycrystalline Silicon TFTs

Author(s):
Mei, P.
Anderson, G.B.
Boyce, J.B.
Fork, D.K.
Hack, M.
Johnson, R.I.
Lujan, R.A.
Ready, S.E.
Wu, I.W.
4 more
Publication title:
Proceedings of the Second Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-35
Pub. Year:
1994
Page(from):
92
Page(to):
102
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770941 [1566770947]
Language:
English
Call no.:
E23400/950720
Type:
Conference Proceedings

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