Selectively Etching GaAs/ AlxGa1-xAs Using a Buffered Citric Acid Etch

Selectively Etching GaAs/ AlxGa1-xAs Using a Buffered Citric Acid Etch

Author(s):

Publication title:

Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI)

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-34

Pub. Year:

1994

Page(from):

141

Page(to):

146

Pages:

6

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770934 [1566770939]

Language:

English

Call no.:

E23400/950719

Type:

Conference Proceedings

Details

TDL ID:	ZA00014143
Series ID:	PA00000028
Conf. info. (Name):	State-of-the-Art Program on Compound Semiconductors - SOTAPOCS ; Meeting of the Electrochemical Society
Conf. info. (Number):	21st ; 186th
Conf. info. (Venue):	Miami Beach, FL, USA
Conf. info. (Date):	1994.10.09-1994.10.14

Similar Items:

1 Conference Proceedings SELECTIVE GROWTH OF GaAs AND AlXGa1-XAs BY OMVPE USING TERTIARYBUTYLARSINE Tokuda, K.L., Kisker, D.W., Lamont-Schnoes, M., Lopata, J. Materials Research Society	7 Conference Proceedings In Situ Etching and Chemical Beam Epitaxy of Carbon-Doped AlxGa1-xAs Using Trisdimethylaminoarsenic Tu, C.W., Li, N.Y. Electrochemical Society
2 Conference Proceedings Selective Etching of GaAs/AlxGa1-xAs for Heterostructure Field Effect Transistors Kitano, T., Izumi, S., Minami, H., Takano, H., Sato, K., Ishihara, O. Electrochemical Society	8 Conference Proceedings DX centres in Si ｦﾄ doped GaAs and AlxGa1-xAs? Koenraad,PM, Lange,W de, Blom,FAP, Leys,MR, Perenboom,JAAJ, Singleton,J, Vleuten,WC vander, Wolter,JH Trans Tech Publications
3 Conference Proceedings LIMITATIONS TO THE BANDGAP-SELECTIVE PHOTOELECTROCHEMICAL ETCHING OF GaAs/AlXGa1-XAs HETEROSTRUCTURES Khare, Reena, Bruce Young, D., Hu, Evelyn L. Materials Research Society	9 Conference Proceedings Optical gain of unstrained graded GaAs/AlxGa1-xAs quantum well laser Albuquerque, E. L., Ferreira, E. C., da Costa, J. A. P. SPIE - The International Society of Optical Engineering
4 Conference Proceedings INTERFACE DEFECTS IN GaAs AND GaAs-AlXGa1-XAs GROWN ON Ge Cho, N. -H., McKernan, S., Wagner, D. K., Carter, C. B. Materials Research Society	10 Conference Proceedings MODELLING OF GAS-PHASE AND SURFACE KINETICS IN MOVPE OF GaAs AND AlXGa1-XAs Mountziaris, T.J., Ingle, N.K., Kalyanasundaram, S. Materials Research Society
5 Conference Proceedings Thick AlxGa1-xAs in GaAs/AlxGa1-xAs Quantum Wells:a Leaky Barrier, Kim,D.S., Ko,H.S., Kim,Y.M., Rhee,S.J., Hong,S.C., Yee,D.S., Woo,J.C., Choi,H.J., Ihm,J. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Characterization of modulation-doped n-AlxGa1-xAs/GaAs heterostructure using spectroscopic ellipsometry and photoreflectance Wong,C.C., Mochizuki,M., Yaguchi,H., Saitoh,T., Xiong,Y.-M. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Effect of Calcination Temperature in the Aluminum Oxide Synthesized by Pechini Method in the Citric Acid: Metal Cation Ratio of 2:1 M.C. da Silva, H.L. Lucena, N.L. de Freitas Trans Tech Publications	12 Conference Proceedings GROWTH OF GaAs, InxGa1-xAs, AND AlxGa1-xAs ON GaAs(111)B SUBSTRATES BY MOLECULAR BEAM EPITAXY Yang,K., Schowalter, L. J., Laurich, B. K., Smith, D. L. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12