Blank Cover Image

New Level of Thermal Management in Vertical CVD Rotating Disk Reactor Technology

Author(s):
Gurary, A.I.
Tompa, G.S.
Thompson, A.G.
Stall, R.A.
Kroll, W.J.
Schumaker, N.E.
1 more
Publication title:
Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-34
Pub. Year:
1994
Page(from):
78
Page(to):
84
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770934 [1566770939]
Language:
English
Call no.:
E23400/950719
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings PRODUCING AND CONTROLLING SUBSTRATE TEMPERATURE UNIFORMITY FROM 600｡？TO 1100｡？IN CVD ROTATING DISK REACTORS

Gurary, A. I., Tompa, G. S., Stall, R. A., Kroll, W. J., Zawadzki, P., Schumaker, N. E.

MRS - Materials Research Society
7 Conference Proceedings Comparison Between Theory and Experiment for Large CVD Rotating Disk Reactors

Thompson, A.G., Zawadzki, P., Armour, E., Stall, R.A., Evans, G.H.

Electrochemical Society
2 Conference Proceedings NEW TECHNOLOGY AND DEVELOPMENTS IN COMPOUND SEMICONDUCTOR VERTICAL RDR-MOCVD GROWTH SYSTEMS

McKee, M., Tompa, G. S., Zawadzki, P. A., Thompson, A., Gurary, A., Beckham, C., Schumaker, N. E., Moy, K.

MRS - Materials Research Society
8 Conference Proceedings High Quality P-type GaN and InGaN Epitaxial Growth on C-Sapphire Substrates in a Production Scale Multi-Wafer Rotating Disc MOCVD Reactor

Yuan, C., Salagaj, T., Gurary, A., Thompson, A.G., Kroll, W., Stall, R.A., Schurman, M., Hwang, C.-Y, Li, Y., Mayo, …

Electrochemical Society
3 Conference Proceedings DEVELOPMENT AND IMPLEMENTATION OF LARGE AREA, ECONOMICAL ROTATING DISK REACTOR TECHNOLOGY FOR METALORGANIC CHEMICAL VAPOR DEPOSTION

Tompa, G. S., Zawadzki, P. A., McKee, M., Wolak, E., Moy, K., Stall, R. A., Gurary, A., Schumaker, N. E.

MRS - Materials Research Society
9 Conference Proceedings UNIFORMITY CONTROL IN ELEMENTAL VAPOR TRANSPORT EPITAXY

Gurary, A.I., Tompa, G.S., Stall, R.A., Liang, S., Lu, Y., Kuo, H.C.

Materials Research Society
4 Conference Proceedings MOCVD Production of III-V Nitride Materials in a Multi-Wafer Rotating Disk Reactor

Liu, H., Thompson, A.G., Chern, C.S., Zawadzki, P.A., Kroll, W.J., Stall, R.A., Hwang, C-Y., Mayo, W.E.

Electrochemical Society
10 Conference Proceedings A SYNERGISTIC APPROACH TO ENVIRONMENTAL CONCERNS IN LARGE SCALE MOCVD PROCESSES

Thompson, A. G., Tompa, G. S., Zawadzki, P. A., McKee, M., Beckham, C., Powers, A., Gurary, A., Moy, K., Schumaker, N. …

MRS - Materials Research Society
5 Conference Proceedings Vertical high-speed rotating disk reactors for production scale MOVPE of compound semiconductors

R.C. Walker, A. Thompson, G.S. Tampa, P.A. Zawadzki, A. Gurary

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings IN SITU GROWTH OF YBa2Cu3O7-x FILMS BY METAL ORGANIC CHEMICAL VAPOR DEPOSITION USING VERTICAL, HIGH-SPEED ROTATING DISK REACTOR

Noh, D.W., Gallois, B., Li, Y.Q., Chern, C., Kear, B., Tompa, G.S., Norris, P., Zawadzki, P.

Materials Research Society
6 Conference Proceedings METAL ORGANIC CHEMICAL VAPOR DEPOSITION OF Al AND CuAl ALLOY FILMS IN A VERTICAL, HIGH-SPEED, ROTATING DISK REACTOR

Tompa, G.S., Wolak, E., Stall, R.A., George, M.A., Lippitt, M., Norman, John A.T.

Materials Research Society
12 Conference Proceedings MECHANICAL THERMAL AND FLOW DYNAMICS ISSUES IN COMPOUND SEMICONDUCTOR MOCVD REACTOR DESIGN

Gurary, A. I., Tompa, G. S., Moy, K., Zawadzki, P.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12