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New Level of Thermal Management in Vertical CVD Rotating Disk Reactor Technology

Author(s):
Gurary, A.I.
Tompa, G.S.
Thompson, A.G.
Stall, R.A.
Kroll, W.J.
Schumaker, N.E.
1 more
Publication title:
Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-34
Pub. date:
1994
Page(from):
78
Page(to):
84
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770934 [1566770939]
Language:
English
Call no.:
E23400/950719
Type:
Conference Proceedings

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