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MOCVD Production of III-V Nitride Materials in a Multi-Wafer Rotating Disk Reactor

Author(s):
Liu, H.
Thompson, A.G.
Chern, C.S.
Zawadzki, P.A.
Kroll, W.J.
Stall, R.A.
Hwang, C-Y.
Mayo, W.E.
3 more
Publication title:
Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-34
Pub. Year:
1994
Page(from):
24
Page(to):
29
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770934 [1566770939]
Language:
English
Call no.:
E23400/950719
Type:
Conference Proceedings

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