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New Applications of Ellipsometry for Materials Characterization and VLSI Device Process Control

Author(s):
Publication title:
Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-33
Pub. date:
1994
Page(from):
207
Page(to):
216
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770927 [1566770920]
Language:
English
Call no.:
E23400/951106
Type:
Conference Proceedings

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