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11 The HI-MEMS alliance: electrochemical microfabrication manufacturing technology for MEMS

Author(s):
Publication title:
Proceedings of the Second International Symposium on Electrochemical Microfabrication
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-32
Pub. Year:
1994
Page(from):
122
Page(to):
129
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770910 [1566770912]
Language:
English
Call no.:
E23400/950718
Type:
Conference Proceedings

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