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1 Recent and future technical trends of electrochemical microfabrication technology in Japanese electronics

Author(s):
Nihei, K.  
Publication title:
Proceedings of the Second International Symposium on Electrochemical Microfabrication
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-32
Pub. date:
1994
Page(from):
3
Page(to):
29
Pages:
27
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770910 [1566770912]
Language:
English
Call no.:
E23400/950718
Type:
Conference Proceedings

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