1 Recent and future technical trends of electrochemical microfabrication technology in Japanese electronics

1 Recent and future technical trends of electrochemical microfabrication technology in Japanese electronics

Author(s):: Nihei, K.
Publication title:: Proceedings of the Second International Symposium on Electrochemical Microfabrication
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 1994-32
Pub. Year:: 1994
Page(from):: 3
Page(to):: 29
Pages:: 27
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566770910 [1566770912]
Language:: English
Call no.:: E23400/950718
Type:: Conference Proceedings

Details

TDL ID:	ZA00014141
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Electrochemical Microfabrication
Conf. info. (Number):	2nd
Conf. info. (Venue):	Miami Beach, FL, USA
Conf. info. (Date):	1994.10.10-1994.10.12

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