Etch Induced Gate Oxide Degradation in an Electron Cyclotron Resonance Plasma Etcher

Etch Induced Gate Oxide Degradation in an Electron Cyclotron Resonance Plasma Etcher

Author(s):

Lee, S.H.

Publication title:

Proceedings of the Third International Symposium on Corrosion and Reliability of Electronic Materials and Devices

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-29

Pub. Year:

1994

Page(from):

293

Page(to):

302

Pages:

10

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770880 [1566770882]

Language:

English

Call no.:

E23400/950680

Type:

Conference Proceedings

Details

TDL ID:	ZA00014138
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Corrosion and Reliability of Electronic Materials and Devices
Conf. info. (Number):	3rd
Conf. info. (Venue):	Miami Beach, Florida, USA
Conf. info. (Date):	1994.10.09-1994.10.14

Similar Items:

1 Conference Proceedings Growth Behavior of Carbon Tips Grown by Electron Beam Induced Deposition Method S.H. Park, S.H. Kim, J.K. Shin, J.W. Kim, C.J. Kang, Y.S. Kim, Y.J. Choi Trans Tech Publications	7 Conference Proceedings Damage Investigation of GaAs and InGaP Dry Etched with an Electron Cyclotron Resonance Source Cole, M.W., Han, W.Y., Pfeffer, R.L., Eckart, D.W., Pang, S.W., Ko, K.K., Ren, F., Hobson, W.S., Lothian, J.R., Lopata, … Electrochemical Society
2 Conference Proceedings Structural Characteristics Of Carbon Nanorods and Nanotubes Grown Using Electron Cyclotron Resonance Chemical Vapor Deposition Woo, Y. S., Han, I. T., Park, Y. J., Kim, H. J., Jung, J. E., Lee, N. S., Jeon, D. Y., Kim, J. M. Materials Research Society	8 Conference Proceedings Application of Cr-less mask technology for sub-100-nm gate with single exposure Kim, S.-H., Chung, D.-H., Park, J.S.., Shin, I.K., Choi, S.W., Sohn, J.-M., Lee, J.-H., Shin, H.-S., Chen, J.F., Van Den … SPIE-The International Society for Optical Engineering
3 Conference Proceedings Abnormal Hysteresis Property of SiC Oxide C-V Characteristics Choi, J.-S., Lee, W.-S., Shin, D.-H., Lee, H.-G., Kim, Y.-S., Park, K.-H. Trans Tech Publications	9 Conference Proceedings Fabrication of Oxide/Semiconducting Coaxial Nanotubular Materials Using Atomic Layer Deposition Jeong, D.K., Park, N.H., Jung, S.H., Jung, W.G., Shin, H., Lee, J.G., Kim, J.Y. Trans Tech Publications
4 Conference Proceedings Abnormal Hysteresis Property of SiC Oxide C-V Characteristics Choi, J.-S., Lee, W.-S., Shin, D.-H., Lee, H.-G., Kim, Y.-S., Park, K.-H. Trans Tech Publications	10 Conference Proceedings Full-chip application for SRAM gate at 100-nm node and beyond using chromeless phase lithography Park, J.-S., Kim, S.-H., Shin, I.-K., Choi, S.-W., Sohn, J.-M., Lee, J.-H., Shin, H.-S., Laidig, T.L., Van den Broeke, … SPIE - The International Society of Optical Engineering
5 Conference Proceedings A Study on the Behavior of Water Absorption of SiOF Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition Method Kim, S.P., Choi, S.K., Park, Youngsoo, Chung, Ilsub Materials Research Society	11 Conference Proceedings Fabrication of Thin Film Using Nanosized Indium Tin Oxide (ITO) Powder and Its Degradation Characteristics Kim, Y.N., Park, J.H., Shin, H.G., Song, J.K., Lee, H.S. Trans Tech Publications
6 Conference Proceedings EFFECTS OF SILICON ION IMPLANTATION UPON THIN GATE OXIDE INTEGRITY Lee, G.-S., Park, J. -G., Choi, S. -P., Shin, C.-H,, Sun, Y.-B, Kwak, Y.-S., Shin, C.-K., Smith, W. L., Hahn, S. Materials Research Society	12 Conference Proceedings Plasma Etching for the Application to Low-K Dielectrics Devices J.W. Lee, H.W. Kim, J.W. Han, M.S. Kim, B.D. Yoo, M.H. Kim, C.H. Lee, C.H. Lim, S.K. Hwang, C. Lee, D.J. Chung, S.G. … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12